Coatings, Vol. 12, Pages 130: Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range

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Coatings, Vol. 12, Pages 130: Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range
Coatings doi: 10.3390/coatings12020130
Authors:
Yury G. Yushkov
Efim M. Oks
Andrey

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