Coatings, Vol. 12, Pages 36: Tantalum-Titanium Oxynitride Thin Films Deposited by DC...
Coatings, Vol. 12, Pages 36: Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization
read more