Coatings, Vol. 12, Pages 36: Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization
Coatings doi: 10.3390/coatings12010036
Authors:
Daniel Cristea
Ioana-Laura Velicu
Luis Cunha
Coatings, Vol. 12, Pages 36: Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization
